Máy đo bằng tia X-ray Nikon XT H 160

Microfocus source

Max. kV

Max. power

Focal spot size

Focal spot size
at max power

XT H 160

XT H 225

160 kV Xi, Reflection target

160 kV

60 W

3 µm up to 7 W

60 µm at 60 W

B

160 kV Reflection target

160 kV

225 W

3 µm up to 7 W

225 µm at 225 W

A

180kV Transmission target

180 kV

10 W

1 µm up to 3 W

10 µm at 10 W

A

225 kV Reflection target

225 kV

225 W

3 µm up to 7 W

225 µm at 225 W

B

225 kV Rotating target option

225 kV

450 W

10 µm up to 30 W

113 µm at 450 W

A

B

Basic configuration

A

Alternative configuration

Detectors

# Bits

Active pixels

Pixel Size

Max. frame rate at 1x1 binning

Max. frame rate at 2x2 binning

XT H 160

XT H 225

Varian 1313

14-bit

1000 x 1000

127 µm

10 fps

30 fps

A

Varian 2520

14-bit

1900 x 1516

127 µm

7.5 fps

15 fps

A

A

Varian 4030

14-bit

2300 x 3200

127 µm

3 fps

7 fps

A

Perkin Elmer 0820

14-bit

1000 x 1000

200 µm

7.5 fps

15 fps

A

A

Manipulator

# Axes

5

Axes travel

(X) 185 mm
(Y) 250 mm
(Z) 700 mm
(Tilt) +/- 30
(Rotate) n*360°

Max. sample weight

15kg

General

Cabinet dimensions (LxWxH)

1,830 mm x 875 mm x 1,987 mm

Weight

2,400 kg

Safety

All systems are manufactured to IRR99

Control software

All systems are controlled by Nikon Metrology’s in-house Inspect-X software